Excel Overview Document
Excel 511
Starting Price: US$59,400
420 × 520 × 160
Range (mm)
•
2.7+L/200
XY Accuracy (μm)
•
100
Capacity (kg)
Specifications
| Physical | Excel 511 |
|---|---|
| Measurement Volume | 420 × 520 × 160 mm |
| XY Accuracy (μm) | 2.7+L/200 1, 2, 3 |
| Stage Capacity | 100 kg |
| Exterior Dimensions | 1295 × 1221 × 1629 mm |
| Machine Weight | 732 kg |
| X Max Speed | 500 mm/s |
| Y Max Speed | 500 mm/s |
| Z Max Speed | 250 mm/s |
| Linear Resolution | 0.05 μm |
Stage capacity is based on an evenly distributed load.
1 Within operating temperature of 20.0℃ ± 1℃ at the focal point position.
2 L is in mm.
3 Using Micro-Vu Calibration Artifact
| Electrical | Excel 511 |
|---|---|
| Input Voltage | 100-240 VAC |
| Power Consumption (Max) | 210 W |
| Power Consumption (Idle) | 55 W |
| Power Consumption (Sleep) | 45 W |
| Environmental | Excel 511 |
|---|---|
| Operating Temperature | 18-27; <1 change per hour, <2 change per day °C |
| Storage Temperature | 0 - 50 °C |
| Relative Humidity | 30%-80% (Non-Condensing) |
| Sound Level | < 70 dB(A) |
| Max Altitude | 4000 m |
Product information is subject to change without prior notice as a result of ongoing technical development.
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Products and specifications subject to change without notice.