Excel Overview Document
Excel 1301
Starting Price: US$102,590
1050 × 1300 × 160
Range (mm)
•
3.7+L/200
XY Accuracy (μm)
•
100
Capacity (kg)
Specifications
| Physical | Excel 1301 |
|---|---|
| Measurement Volume | 1050 × 1300 × 160 mm |
| XY Accuracy (μm) | 3.7+L/200 1, 2, 3 |
| Stage Capacity | 100 kg |
| Exterior Dimensions | 1925 × 2208 × 1647 mm |
| Machine Weight | 3085 kg |
| X Max Speed | 500 mm/s |
| Y Max Speed | 500 mm/s |
| Z Max Speed | 250 mm/s |
| Linear Resolution | 0.05 μm |
Stage capacity is based on an evenly distributed load.
1 Within operating temperature of 20.0℃ ± 1℃ at the focal point position.
2 L is in mm.
3 Using Micro-Vu Calibration Artifact
| Electrical | Excel 1301 |
|---|---|
| Input Voltage | 100-240 VAC |
| Power Consumption (Max) | 255 W |
| Power Consumption (Idle) | 55 W |
| Power Consumption (Sleep) | 45 W |
| Environmental | Excel 1301 |
|---|---|
| Operating Temperature | 18-27; <1 change per hour, <2 change per day °C |
| Storage Temperature | 0 - 50 °C |
| Relative Humidity | 30%-80% (Non-Condensing) |
| Sound Level | < 70 dB(A) |
| Max Altitude | 4000 m |
Product information is subject to change without prior notice as a result of ongoing technical development.
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Products and specifications subject to change without notice.