| Physical | Quantum 14x14 | Quantum 28x24 |
| Measuring Volume | 350x350x135mm (14"x14"x5.5") |
700x600x135mm (28"x24"x5.5") |
| External Dimensions | 950x1075x1775mm (38"x43"x71") |
1300x1525x1775mm (52"x61"x71") |
| Weight | 1135kg (2500lb) | 1590kg (3500lb) |
| Capacity | 12kg (25lb) | 12kg (25lb) |
| Stage Material | Aluminum | |
| Base Material | Granite | |
| Ways X&Y | Airbearings | |
| Performance | Quantum 14x14 | Quantum 28x24 |
| XY Accuracy | E2 = (1.5+L/250) µm | E2 = (2.0+L/250) µm |
| Z Accuracy | E1 = (5.0+L/30) µm | E1 = (5.0+L/30) µm |
| XY Repeatability | < 1.5 µm | < 2.0 µm |
| Z Repeatability | < 5.0 µm | < 5.0 µm |
| X,Y Acceleration | 600 mm/s² (24 in/s²) | |
| Z Acceleration | 100 mm/s² (4 in/s²) | |
| X,Y Velocity | 300 mm/s (12 in/s) | |
| Z Velocity | 50 mm/s (2 in/s) | |
| Encoder Resolution | 0.5µm (0.000020") | |
| Features | Quantum 14x14 | Quantum 28x24 |
| Video | High Resolution B&W | |
| Profile Light | Red LEDs with Iris | |
| Surface Light | Red LEDs | |
| Coaxial Light | Red LED | |
| Optics / Magnification | 6.5:1 Programmable Zoom, 0.7-4.5x | |
| Software | InSpec Metrology Software | |
| Motion Control | Linear Servo, CNC, Mouse and Joystick | |
| Computer | 1.2GHz, 256 MB, 20 GB, CDRW, Ethernet, Frame Grabber | |
| Warranty | 1 Year Parts and Labor | |
| Requirements | Quantum 14x14 | Quantum 28x24 |
| Environmental | 20º C (68º F) +/-2º, 30-80% Humidity | |
| Power | 93-264 VAC, 47-63 Hz, 10 Amp | |
| Air | 80 PSI, 5 CFM, Clean & Dry | |
| Repeatability based on Micro-Vu Accuracy and Repeatability specifictaion using 0.5 micron encoders | ||
| Mechanical accuracy of Z. Accuracy of focus is surface dependant. | ||
| Magnification is from part to camera chip. | ||
| Computer components may be updated without notice. | ||
| Included computer console is 1250x750mm (50"x30") | ||
| Specifications state maximum acceleration and velocity values. | ||
