Physical	Excel 4120	Excel 4220	Excel 5120	Excel 5220	Excel 6120	Excel 6220
Measuring Volume	600x600x150mm (23.6"x23.6"x5.9")		900x1200x150mm (35.4"x47.2"x5.9")		1200x1500x150mm (47.2"x59.0"x5.9")
External Dimensions	1675x1200x1600mm (66"x47"x63")		2285x1525x1650mm (90"x60"x65")		2590x1855x1725mm (102"x73"x68")
Weight	910kg (2000lb)		2050kg (4500lb)		3410kg (7500lb)
Capacity	100kg (220lb)
Ways	Unique X,Y Linear Ways, Monorail Z
Stage Material	Steel Gantry Beams
Base Material	Granite
Performance	Excel 4120	Excel 4220	Excel 5120	Excel 5220	Excel 6120	Excel 6220
XY Accuracy	E2 = 3.5+L/300 µm		E2 = 5.0+L/300 µm		E2 = 5.5+L/300 µm
XY Repeatability	< 3.5 µm		< 5.0 µm		< 5.5 µm
Z Accuracy	E1 = 3.0+L/150 µm
Z Repeatability	< 3.0 µm
XY Acceleration	1000 mm/s² (40 in/s²)
Z Acceleration	500 mm/s² (20 in/s²)
XY Velocity	700 mm/s (28 in/s)
Z Velocity	100 mm/s (4 in/s)
Encoder Resolution	0.5 µm
Features	Excel 4120	Excel 4220	Excel 5120	Excel 5220	Excel 6120	Excel 6220
Video	B&W	Color	B&W	Color	B&W	Color
Profile Light	Red LEDs	White LEDs	Red LEDs	White LEDs	Red LEDs	White LEDs
Surface Light
Coaxial Light
Optics / Magnification	12:1 Programmable Zoom, 0.7-4.5x
Software	InSpec Metrology Software
Motion Control	Linear Servo, CNC, Mouse and Joystick
Warranty	1 Year
Requirements	Excel 4120	Excel 4220	Excel 5120	Excel 5220	Excel 6120	Excel 6220
Environmental	20º C (68º F) +/-2º, 30-80% Humidity
Power	93-264 VAC, 47-63 Hz, 10 Amp
Repeatability based on Micro-Vu Accuracy and Repeatability specification using 0.5 micron encoders
Mechanical accuracy of Z. Accuracy of focus is surface dependant.
Magnification is from part to camera chip.
Computer components may be updated without notice.
Included computer console is 1250x750mm (50"x30")
Specifications state maximum acceleration and velocity values.
Specification subject to change without notice